This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
IEC 62047-1 Ed. 1.0 b:2005
Original price was: $182.00.$91.00Current price is: $91.00.
Semiconductor devices – Micro-electromechanical devices – Part 1: Terms and definitions
International Electrotechnical Commission , 09/27/2005
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