IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices.
IEC 60050-523 Ed. 1.0 b:2018
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International Electrotechnical Vocabulary (IEV) – Part 523: Micro-electromechanical devices
International Electrotechnical Commission , 12/06/2018
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