This document, which is a Technical Report, is focused on the practical protocol of ellipsometryto evaluate the thickness of nanoscale films. This document does not include any specificationof the ellipsometers, but suggests how to minimize the data variation to improve datareproducibility.
BS PD IEC TR 63258:2021
Original price was: $264.16.$132.00Current price is: $132.00.
Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films
BSI Group , 03/25/2021
Pages: 24
