Adopts ISO 14606:2000 to give guidance on the optimization of sputter depth profiling parameters using appropriate single-layered and multi-layered reference materials in order to achieve optimum depth resolution as a function of instrument settings.
AS ISO 14606-2006
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Surface chemical analysis – Sputter depth profiling – Optimization using layered systems as reference materials
Standards Australia , 10/20/2006
Pages: 15
