This part of IEC 62047 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric‑field‑sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric‑field‑sensitive devices. The statements made in this document are also applicable to MEMS resonant electric‑field‑sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.
IEC 62047-44 Ed. 1.0 en:2024
Original price was: $148.00.$74.00Current price is: $74.00.
Semiconductor devices – Micro-electromechanical devices – Part 44: Test methods for dynamic performances of MEMS resonant electricfield- sensitive devices
International Electrotechnical Commission , 02/01/2024
Pages: 24
