IEC 60747-18-3:2019(E) specifies the fluid flow characteristics of lens-free CMOS photonic array sensor package modules with fluidic system for bio analysis. This document includes the measurement set-up, measurement and calculation at initial state flow, criteria of the fluidic system for quality assurance, measurement and calculation at steady-state flow, and test report.
IEC 60747-18-3 Ed. 1.0 en:2019
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Semiconductor devices – Part 18-3: Semiconductor bio sensors – Fluid flow characteristics of lens-free CMOS photonic array sensor package modules with fluidic system
International Electrotechnical Commission , 12/11/2019
Pages: 22
