IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
IEC 62047-34 Ed. 1.0 en:2019
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Semiconductor devices – Micro-electromechanical devices – Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
International Electrotechnical Commission , 04/05/2019
Pages: 16
